3

Analysis of Halbach magnet array and its application to linear motor

Year:
2004
Language:
english
File:
PDF, 499 KB
english, 2004
6

Optimal design of a flexure hinge based XYφ wafer stage

Year:
1997
Language:
english
File:
PDF, 1.35 MB
english, 1997
12

Development of dynamic tilt control method and servo algorithm in gap servo NFR

Year:
2009
Language:
english
File:
PDF, 697 KB
english, 2009
13

Error analysis of a flexure hinge mechanism induced by machining imperfection

Year:
1997
Language:
english
File:
PDF, 546 KB
english, 1997
22

Modelling and optimum design of a fine actuator for optical heads

Year:
1997
Language:
english
File:
PDF, 579 KB
english, 1997
23

Inverse kinematic modeling of a coupled flexure hinge mechanism

Year:
1999
Language:
english
File:
PDF, 269 KB
english, 1999
24

A state estimator design for multimodal adjustmentprocess using genetic algorithm

Year:
1999
Language:
english
File:
PDF, 542 KB
english, 1999
40

Development of a compact and long range XYθz nano-positioning stage

Year:
2012
Language:
english
File:
PDF, 3.31 MB
english, 2012